Features about 'LITHOGRAPHY'

June 2011

Winner takes all

Greg Blackman speaks to Phil Alibrandi of Gigaphoton, about the recent buyout of the company and what that means for the EUV lithography community

February 2016

The future of EUV lithography

Extreme ultraviolet lithography holds the potential for transforming semiconductor manufacturing. Gemma Church finds that commercial systems could be put into production within the next two years

February 2015

EUV ready for volume production?

There have been positive signs from the likes of ASML that EUV lithography is finally ramping up for volume production of silicon chips. Greg Blackman reports

February 2014

Mirror on semicon

To bring EUV lithography into mainstream semiconductor production will require more powerful sources, but there is also a lot of development work underway on the optics for the systems, as Katia Moskvitch discovers

February 2013

Printing at the extreme

Immersion lithography has all but reached the limit of how small it can print features on silicon chips. Extreme UV lithography promises to be the answer, but there`s still a lot of work to be done before the technology is ready for commercial use, as Greg Blackman discovers

October/November 2009

Lithography lessons

Being able to engineer integrated circuits with higher transistor counts involves printing smaller structures. Photolithography, used in silicon chip fabrication, employs a variety of optical trickery to reduce the size of printed features, as Greg Blackman finds out

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