LENSES AND OPTICS
30 January 2013
Newport, a provider of laser and photonic solutions, has introduced long-lived deep ultraviolet (UV) excimer laser mirrors. The company says the mirrors have projected lifetimes greater than 30 billion pulses when used in the proper photocontamination-controlled environment.
The mirrors feature all-dielectric, high-reflector coatings to minimise absorption and maximise reflected energy at 193 nm.
The high-energy laser mirrors are designed with excimer-grade UV fused silica substrates, which are polished to better than λ/10 flatness and 10-5 surface quality to preserve wavefront quality and maintain excellent stability.
All coating and testing are done in a special photocontamination-controlled deep UV cleanroom that has been qualified to 193nm standards.