EUV Lithography

EUV ready for volume production?

There have been positive signs from the likes of ASML that EUV lithography is finally ramping up for volume production of silicon chips. Greg Blackman reports

Mirror on semicon

To bring EUV lithography into mainstream semiconductor production will require more powerful sources, but there is also a lot of development work underway on the optics for the systems, as Katia Moskvitch discovers

Printing at the extreme

Immersion lithography has all but reached the limit of how small it can print features on silicon chips. Extreme UV lithography promises to be the answer, but there`s still a lot of work to be done before the technology is ready for commercial use, as Greg Blackman discovers

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