LITHOGRAPHY

The future of EUV lithography

Extreme ultraviolet lithography holds the potential for transforming semiconductor manufacturing. Gemma Church finds that commercial systems could be put into production within the next two years

Lithography lessons

Being able to engineer integrated circuits with higher transistor counts involves printing smaller structures. Photolithography, used in silicon chip fabrication, employs a variety of optical trickery to reduce the size of printed features, as Greg Blackman finds out

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