LITHOGRAPHY

Jessica Rowbury looks at the role metalenses could play in chip-making

Extreme ultraviolet lithography holds the potential for transforming semiconductor manufacturing. Gemma Church finds that commercial systems could be put into production within the next two years

Being able to engineer integrated circuits with higher transistor counts involves printing smaller structures. Photolithography, used in silicon chip fabrication, employs a variety of optical trickery to reduce the size of printed features, as Greg Blackman finds out