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AXUV100TF030 and AXUV100TF400

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Opto Diode has introduced two new photodetectors, the AXUV100TF030 and AXUV100TF400, with 100mm2 active areas and directly deposited thin-film filters for extreme ultraviolet (EUV) detection.

The AXUV100TF030 features typical responsivity of 0.16A/W at 3nm and has a detection range from 1-12nm. TheAXUV100TF400 features typical responsivity of 0.15A/W at 40nm with a detection range from 18-80nm.  

Both devices are shipped with a temporary protective cover and have superior stability for robust operation in EUV environments. Operating and storage temperatures range from -10°C to +40°C in ambient environments and from -20°C to +80°C in nitrogen or vacuum environments.