PI-MTE3 2048B and 4096B

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Princeton Instruments has released two large format in-vacuum CCD cameras engineered specifically for direct detection in VUV, EUV, and x-ray imaging applications from approximately 10eV to 30keV.

Rated at 10-9 Torr, the new PI-MTE3 cameras are designed for applications such as x-ray microscopy, x-ray spectroscopy, x-ray phase contrast imaging, x-ray diffraction, deep-UV lithography, and semiconductor metrology. An offset CCD detector provides close access to samples for small-angle x-ray scattering (SAXS) and low-grazing-incidence applications.

The PI-MTE3 2048B and 4096B camera models use 2k x 2k (30.7mm x 30.7mm) and 4k x 4k (61.4mm x 61.4mm) back-illuminated CCDs respectively to offer more than 95 per cent peak quantum efficiency. Due to their four-port readout architecture, these new, low-noise, 16-bit cameras provide frame rates up to 7-10 times higher than previous-generation two-port cameras.

The cameras’ efficient liquid cooling results in low dark current, facilitating long integration times. Its advanced thermal design also permits 24/7 operation in-vacuum.

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