MEMS-based, low wobble scanners developed

Researchers at the The Fraunhofer IPMS have developed a customised silicon-based resonant and quasi-static micro-electromechanical system (MEMS) for deflection and modulation of light. The device is intended as a replacement for conventional galvanometer-based optical scanners, which typically feature large optical apertures. The design of conventional scanners can limit the precision of motion, particularly at high velocity.

A characteristic measure for the quality of scanner motion is the dynamic mirror tilt, perpendicular to the axis of rotation. Mirror tilt leads to a tumbling motion and a deformation of the scanned beam, often referred to as cross-axes wobble. Cross-axes wobble of conventional resonant galvanometer scanners is typically in the order of 200μrad.

The silicon-based resonant and quasi-static micro-electromechanical system developed by Fraunhofer offers high velocity scanning with superior precision, and the researchers have now demonstrated that typical resonant designs provide a cross-axes wobble of less than 35μrad. Thereby the device oscillates at 23kHz with a mechanical amplitude of ±9°.

Dr André Dreyhaupt, scientist at the microscanner product development group, stated: 'The optical MEMS structures of the Fraunhofer IPMS perfectly fit for challenging applications with high demands on velocity and precision of motion at the same time.'

Twitter icon
Google icon icon
Digg icon
LinkedIn icon
Reddit icon
e-mail icon