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AVIA 355-33

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The newest AVIA micromachining laser from Coherent delivers what is currently the highest power commercially available at its wavelength and repetition rate.

Specifically, the AVIA 355-33 offers 33 Watts of output at 355nm (at 110kHz). This high power translates directly into increased production efficiency, thus lowering cost per part.

Coherent says the AVIA family of lasers has the longest track record of highly reliable, 24/7 operation in microelectronics manufacturing, and offers several features specifically designed to enhance its processing capabilities and minimise long term cost of ownership. These include ThermEQ, PulseEQ, and PulseTrack, which enable precise control of the delivered pulse energy, allowing the OEM to define and optimise their laser process.

The laser also has an automated harmonic crystal shifter to maintain constant output power for  more than 20,000 hours and to maximise lifetime. In addition, the laser’s unique Posilock beam position sensor and feedback loop results in high beam position stability over the life of the laser, thereby ensuring process consistency, says Coherent.

The AVIA 355-33 is targeted at a wide range of demanding, high-throughput microelectronics fabrication applications. Typical examples include via-hole drilling in printed circuit boards and flip chips and dicing and scribing of silicon wafers containing low-k dielectric materials.