Ceramic piezo motors and nanopositioning actuators

Physik Instrumente has released a line of compact ceramic piezo motors and nanopositioning actuators to replace classical actuators and motion control components in precision motion control applications such as found in the semiconductor, photonics and nano-biotechnology.  

High-speed motors, high force actuators and zero-wear flexure designs are available. The line has no lubricants, millisecond responsiveness, is non-magnetic and vacuum compatible,

PI offers three advanced types of ceramic, non-magnetic linear motor actuators.  The three types are distinguished by force, travel range, and speed and precision. Basically unlimited travel ranges are provided by both the ultrasonic motor actuators (PILine) and piezo stepping linear motor type actuators (NEXACT & NEXLINE).  While the faster ultrasonic motor actuators provide speeds to 800 mm/sec (32 in/sec), the piezo stepping motor types feature higher resolution and force.

Basic features of the linear motor actuator designs include: non-magnetic, bakeable to 150C, and vacuum-compatible; self-locking at rest, basically unlimited linear travel; stiff construction, millisecond responsiveness and high bandwidth; very compact (from 8x6x2mm) and cost-effective; forces to 500N (50 kg)  (stepping type); speed to 800 mm/sec (ultrasonic type) and position resolution to 30 picometers (stepping type). 

The piezo ceramic linear motors effect linear motion directly, without the need to transform rotation with gears and leadscrews. Backlash and wear are eliminated and the drive is maintenance-free. Piezo ceramic actuators exhibit high stiffness and are self-locking when powered down with nanometer position stability, and zero heat dissipation or servo-dither at rest.

A variety of controllers ranging from OEM boards to rack mount systems and extensive software support is available to precisely control and automate the actuators.