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M-417

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PI (Physik Instrumente) now offers the M-417 stage, which has a repeatability of 0.5µm over a 500mm travel range, for precise positioning tasks in precision fabrication and automation.

The drive of the M-417 comprises an efficient ActiveDrive DC motor with integrated 24V amplifier that acts on the ball screw. Thanks to this structure, the stage achieves a velocity of 100mm/s and is at the same time designed for high duty cycles. The recirculating ball bearings allow for a very high guiding accuracy of 100µrad over the entire travel range.

An incremental, motor-shaft-mounted rotary encoder controls the position with a unidirectional repeatability of 0.5µm. The M-417 stage is 120mm wide and 56mm high. Its stress-relieved aluminium base ensures the stage's high stability.

By eliminating power losses between the amplifier and motor, the ActiveDrive System achieves an increased efficiency. The motor is controlled via pulse-width-modulated (PWM) signals and the operating voltage is obtained with an amplifier integrated in the motor case.

Costs are reduced and the setup is more compact, because no external linear amplifier is needed. In addition, noise radiation is eliminated, since amplifier and motor are mounted together in a single shielded case.