Imec to present high-NA extreme ultraviolet results at conference

The high-NA EUV lab is enabling the hub to produce learnings for the benefit of customers and future research (Image: ASML)

The high-NA EUV lab is enabling the hub to produce learnings for the benefit of customers and future research (Image: ASML)

Imec will present information on advances in processes, masks and metrology that may enable the research hub to fully benefit from the resolution gain achieved with the first ASML 0.55NA EUV scanner.

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