2D microscanning mirrors for VarioS

The Fraunhofer Institute for Photonic Microsystems (IPMS) has now developed and successfully tested 2D microscanning mirrors on its VarioS modular design. The MEMS scanners are available for a multitude of possible applications.

Inquiries about 2D MEMS scanning mirrors are simple to make on the internet at The website offers the user a configuration and ordering tool to specify the dimensions of the mirror plate, scan angle and scan frequency. If required even the dynamic flatness of the mirror plate can be specified. The software checks and lists the configurations that are technically possible and from which the user can select the chip type and batch size for a quote if desired. 2D microscanner demonstrators with mirror diameters between 0.5 and 2mm are available starting from €3,325 and are normally ready for the customer within ten weeks upon placement of an order.