PRESS RELEASE

FMSxxHA

Newport has introduced the latest instalment of its high accuracy FMS stages for higher-end metrology applications.

Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and 300mm models. Similar to the original FMS stages, these HA versions also feature smooth motion, low noise, high straightness and flatness. With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed for high-speed motion, enabling higher throughput. The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.

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