The Korad3Dplus white-light interferometry system from 3D-Shape – part of the Isra Vision Group – is a stand-alone solution for optical 3D object and surface measurements in the nanometre range. Its robust construction allows for use directly in-line, enabling quality assurance that is ultra-precise. The control system with storable measuring processes enables both manual operation and automated integration into the production process. 

The improved Korad3Dplus, with integrated PC and x/y table, is completely encased to minimise contamination from dust and other contaminants. Vibration isolators provide the necessary damping and stability needed on the plant floor. The required maintenance, such as regular calibration and servicing of testing equipment, is considerably less than in the case of tactile measurement devices or laboratory equipment.

Because the light source and camera are mounted coaxially, the cylindrical measurement light beams enable shadow-free scanning of depths such as boreholes, channels and etched structures. It is also possible to take various parameters into account in a single measurement: the roughness, flatness, uniformity, topology and geometric shape of an object can be recorded and evaluated simultaneously.

The surfaces to be inspected are either recorded in their entirety or stitched together from individual measuring fields with an extremely high resolution. The sensor is capable of scanning freely-definable areas sequentially and thus achieves a measuring field for sizes of up to 150 x 150mm². Furthermore, the 100mm, fully height-adjustable scanning device enables inspection of objects with greater height.

The system is equipped with guided workflows and integrated evaluation software, which further reduces the user effort required. In addition, settings used once are automatically saved and thus available at all times for later measurements. The autofocus function captures the inspection area automatically, so only fine adjustments need to be carried out manually.