N-565 linear stage series

Physik Instrumente has introduced the N-565 linear stage series that uses piezoelectric stepping drives. The drives enable repeatability in the range of a few nanometres in addition to high guiding accuracy and high force in a single compact unit.

The stages have a width of 65mm, a height of 20mm, and work with travel ranges of 13, 26 or 52mm. Depending on the travel range, the length is 80, 110, and 160mm. The stages use an optical linear encoder based on an integrated Mach-Zehnder interferometer that enables a resolution of 0.5nm and a minimum incremental motion of 2nm.

The linear stages fulfil positioning requirements in microscopy (samples, optics or mechanical components), the semiconductor industry and for laser set-ups or applications in a vacuum.

The piezoelectric drive is self-locking; if the target position is reached or the system is switched off, the positioning unit maintains the position without current and without generating heat. The holding force of the positioning stage is 10N, the maximum velocity is 10mm/s.

The linear stages can be easily operated with precision with the compact E-861 controller. It supports the different types of motion of the piezo stepping drive and is tuned to the requirements of the mechanics.