P-763 piezo scanner

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With the P-763 piezo scanner, PI (Physik Instrumente) says it complements its product line of precision piezo-driven XY stages with a clear aperture.

This XY nanopositioning system, with 70mm side length, features a large 30 x 30mm clear aperture and is suited for sample handling and positioning as well as for transmitted-light applications.

The P-763 is equipped with PICMA actuators, capacitive sensors for high position stability and high resolution, as well as frictionless flexure joints. With these technical features, the P-763 achieves a 200µm travel range per axis with a non-linearity of 0.02 per cent and a resolution below 1nm.

The resonant frequency of 180Hz achieved at this long 200µm travel range is high and allows for a large dynamic bandwidth of the positioning system. For attaining the system's elevated stiffness, PICMA actuators with a large footprint were selected. For a highly dynamic, nanometer-precise operation the P-763 is suited for control with the powerful E-709.CHG digital controller.