Parabolic optics

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McPherson has introduced plane, spherical, toroidal and off-axis parabolic optics built to suit applications in the soft x-ray, extreme ultraviolet and deep UV. The geometry and coatings can be selected for an application and include sputter or e-beam/ion assisted deposition of protected aluminium, gold, platinum, carbon and nickel.

This selection depends on the specific wavelengths and angles on the optics. Some optics feature multiple coating to emphasise different wavelength regions. McPherson has the capability to check and test normal incidence filters and coatings at wavelengths longer than 115nm.