Rotary and vertical translation nanopositioning stages

Aerotech has introduced two new rotary and two new vertical translation additions to its nano Motion Technology (nMT) range of nanopositioning stages. With Aerotech's direct-drive ANT series now covering 95mm and 130mm wide linear and vertical-linear translation stages in addition to rotary and goniometric angular positioners, users can now specify long travel range, multi-axis nanometre resolution mechanics for high-throughput production and demanding test and research applications.

The new ANT95-R and ANT130-R rotary stages comprise 95mm and 130mm diameter models with a positioning resolution of 0.1 arc sec and a calibrated repeatability of just 2 arc sec. They both utilise Aerotech's direct-drive motor technology for smooth motion with in-position stability to within 0.5 arc sec. Both sizes are available in angular travel ranges of 20°, 180° or continuous 360° rotation. The maximum speed and acceleration of the 360° model is up to 200rpm/400 rad/sec2. Direct axial load capacity is 2kg for the smaller diameter stage and 3kg for the larger stage. The error motion performance across both sizes of rotary stage (tilt, axial and radial) is in line with the overall specifications and suited to demanding high throughput manufacturing applications such as disk-drive fabrication, fibre optic device alignment, and  MEMS sensor manufacture and test.

The ANT95-L-Z and ANT130-L-Z series vertical stages have nominal widths of 95mm and 135mm respectively and a calibrated positioning resolution of 2 nanometres. Supplied complete with vertical mounting angle brackets and  integral pneumatic counterbalance mechanisms, the ANT95-L-Z is available in vertical travel ranges of 25mm and 50mm, while the wider ANT-130-L-Z  offers 35mm and 60mm travel. Within each travel range, a high performance –PLUS option is available which increases the repeatability by 30 per cent; for the ANT95-L-Z-PLUS this yields a bidirectional repeatability of +/- 75 nanometres.

All ANT series stages are protected with a durable black hard-coat finish, and exceptionally long working life and low maintenance is guaranteed by the non contacting direct-drive linear and rotary motor technology and non contacting optical encoders used in the design.

Motion control options include the software only  A3200 Automation Platform with DSP based Npaq drives or the Ensemble series rack or desktop system for multi-axis positioning systems, whilst the Soloist series is well suited to demanding single axis applications. Servo drive technologies include PWM amplifier stages for highest dynamic performance in addition to wide bandwidth and ultra low noise linear servo amplifiers for  best in-position stability/lowest jitter performance.