Lithography

ASML uses light to print tiny patterns onto silicon during the mass production of semiconductor chips. credit: ASML

News story

Harriot-Watt University and ASML partner on light sources for lithography

22 March 2021

Heriot-Watt University and ASML are partnering to develop new optical metrology light sources for chip manufacturing

Analysis and opinion

Connecting climate with photomasks: Using skills for good

8 June 2020

Emily Gallagher, imec, says we can all choose to apply our skills – in her case, within photomask-related semiconductor development – to help minimise the effects of climate change

Feature

Progress in patterning

20 January 2020

Jessica Rowbury looks at the role metalenses could play in chip-making

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Harriot-Watt University and ASML partner on light sources for lithography

Connecting climate with photomasks: Using skills for good

Progress in patterning