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Energetiq's new EUV business unit serves semiconductor space
Construction begins on Jenoptik's €70m fab
New US export controls on semiconductor technologies
Intel demonstrates 8-wavelength laser array on a silicon wafer
Subsidising a way out of semicon shortages
Chipmakers look to EUV lithography’s next generation
Harriot-Watt University and ASML partner on light sources for lithography
Connecting climate with photomasks: Using skills for good
Progress in patterning
ASML president recognised for microchip innovations

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