SolMateS has received an order from Corporate Sector Research and Advance Engineering of Robert Bosch GmbH, Gerlingen for its PiezoFlare 1200 Pulsed Laser Deposition (PLD) system. The system is scheduled for delivery in mid 2013.
'We are pleased with this second sale in a short time,' said SolMateS’ CEO Arjen Janssens, 'especially as this order comes from a world leading MEMS manufacturer. It illustrates the industrial interest for our deposition technology.'
SolMateS says the PiezoFlare 1200 represents a new way to physically deposit different composite materials – a deposition system for thin films on 100, 150 or 200 mm wafers, based on pulsed laser deposition. The technology uses a laser to create a plasma of the material to be deposited, enabling industrial quality deposition of new generation materials.
The automated tool offers high yield, customized deposition of various More than Moore materials. This technology is regarded as the first major step in MEMS technology after the introduction of deep reactive Ion etching and backside alignment.