Plasma monitoring with modular, high-resolution spectroscopy

Plasma monitoring with modular, high-resolution spectroscopy

This article is brought to you by: 

A modular spectroscopy setup based on an Ocean Insight HR series high resolution spectrometer was used to monitor changes in argon plasma emission following the introduction of different gases to a plasma chamber. The measurements demonstrated the viability of modular spectroscopy components to acquire plasma emission spectra in real time from a plasma chamber. Plasma characteristics determined from these emission spectra can be used for monitoring and controlling plasmabased processes.

Premium Access
To access this content please enter your details in the fields below. If you believe you have already done so for this, please resubmit your details in the next form down.
Already registered?
If you believe you have already registered please submit the email you originally entered.