Horiba Jobin Yvon has released an advanced thin film characterisation platform called DeltaPsi2. The software applies to ellipsometry, polarimetry and reflectometry and controls all Horiba Jobin Yvon thin film metrology instruments.
DeltaPsi2 software provides advanced measurements, modelling and reporting capabilities for accurate and flexible characterisation of thin film structures. Features include calculation of thicknesses, optical constants, gradients, anisotropy, alloy composition, bandgap calculation, surface roughness, EMA, backside corrections, multi combined measurements/analysis data and the largest materials database of optical constants.
Ellipsometers such as the UT-300 and FF-1000, and in-line ellipsometers (for example roll to roll monitoring instruments) are also driven by the DeltaPsi2 software platform. The software includes a fully automatic operating environment and advanced communication protocols (RS232, TCP/IP) for robust thin film metrology control. DeltaPsi2 software provides standardised visualisation of mapping results on semiconductor wafer and glass panels, statistical analysis, advanced data manipulation, import/export package function, and reprocessing capabilities.