A new range of pulse energy sensors from Coherent has been optimised for use with ArF lasers operating at 193nm and with KrF lasers at 248nm. The Excimer Laser EnergyMax Series sensors feature high accuracy and large active area, and use a novel coating that delivers superior long-term damage resistance. They can perform pulse energy measurements from 50µJ to 250mJ, and operate at repetition rates from single shot to 400Hz. These sensors are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters.
The Excimer Laser EnergyMax Series is composed of four individual products. These are 25mm and 50mm diameter sensors calibrated specifically at either 193nm or 248nm. Onboard sensors provide automatic temperature compensation, and built-in spectral compensation enables quantitative operation at other wavelengths. Both sensors accept an optional heat sink, which can be easily attached by the user to extend the maximum energy or average power range.