FMSxxHA stages

Newport has introduced its range of FMSxxHA stages for higher-end metrology applications, available in 100, 200 and 300mm models. The HA versions feature smooth motion, low noise, high straightness and flatness.

With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed for high-speed motion, enabling higher throughput. The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.

For added flexibility in gathering metrology data, the FMS Series is compatible with Newport's high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver. Newport's new FMSxxHA product is ideal for surface metrology, surface profilometry and tribology applications.