Coherent has added the fully Semi S2-certified IndyStar 2kHz laser to its family of compact excimer lasers. The new model incorporates several new output stabilisation features for improved processing; making them ideal for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. The new IndyStar 2kHz is offered with a choice of 193nm (ArF) output where it delivers 8W of stabilised power, or 248nm (KrF) output with 12W of stabilised power.
The new IndyStar uses an advanced electronics platform enabling two important new stabilisation features called Powerlok and Timelok. The Powerlok feature ensures constant pulse energy of each single laser pulse, actively stabilised particularly for applications using bursts of pulses or specific pulse trains. Timelok provides superior trigger-to-pulse delay stability, supporting tight synchronisation with other equipment. Plus all IndyStar lasers continue to offer the lowest cost of ownership, in large part because of their use of field-proven Almeta (All-Metal-Ceramic) tube technology, which delivers high reliability and long lifetime. With 193nm operation, the new IndyStar 2kHz shows a tube/optics lifetime exceeding 10 billion laser pulses, which translates into hands-free operation of more than one year.
The IndyStar 2kHz is suitable for semiconductor applications, such as photomask inspection and testing photolithography optics. It also enables other high speed processes including precision material ablation tasks and high-value marking applications.