Opto Diode has introduced the ODD-SXUV-DLPSD, a duo-lateral UV/EUV submicron-position resolution sensor. The device provides a stable response after exposure to ultraviolet and extreme ultraviolet radiation. It is available in a TO-8 windowless package to minimise changes in the diode’s responsivity after exposure. With a 5 x 5mm active area, the ODD-SXUV-DLPSD is suitable for applications in advanced lithography and other positioning applications requiring the use of a sub-200nm wavelength.
The sensing photodiode is designed for position detection of light from 1 to 400nm wavelengths. The responsivity at 13nm is typically 0.20 A/W and at 254nm 0.02 A/W. Dark current is 10 (typical) and 50 (maximum) nA. It features reverse breakdown voltage of a minimum of 50V and a capacitance of 40 (typical) to 60 (maximum) pF.
Operating and storage temperatures range from -10 to 40°C (ambient) and from -20 to 80°C (in nitrogen or vacuum conditions). The maximum junction temperature is 70°C and the lead-soldering temperature is 260°C at 0.080 inch from the case for 10s.