PI's P-563.3CD PIMars stage is a piezoelectric flexure-guided scanning/nanomanipulation system. The unit enables precision motion control with resolution in the sub-nanometre realm and 340 x 340 x 340µm travel in X, Y, and Z directions, described by the company as significantly more than other capacitive-feedback equipped systems currently provide. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezoelectric stages.
Typical applications for the stage include micromanufacturing, bio-technology, nanotechnology, scanning microscopy, and nano-manipulation.