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QNP2 piezo positioning stages

Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometre resolution, high dynamics, and quality geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 x 50mm clear aperture with closed-loop travels of up to 100 x 100µm (open-loop travels to 120 x 120µm). The design is ideal for optical microscopy, scanning probe microscopy, X-ray transmission microscopy, and other applications where two-sided part access is required.

QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures a high level of multi-axis accuracy. FEA-optimised precision flexures ensure high-stiffness and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response. The drive design minimises yaw errors while maintaining an Abbe-compliant metrology system.

All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The capacitive sensor parallel-metrology design measures the output of the positioning carriage directly, enabling 0.15nm resolution, 0.01 per cent linearity, and 1nm bidirectional repeatability.


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