Veeco Instruments has introduced its new InSight 3D Automated Atomic Force Microscope (AFM) Platform.
The system has the accuracy and precision required for non-destructive, high resolution 3D measurements of critical 45nm and 32nm semiconductor features, with the speed to qualify as a true fab tool.
Veeco's InSight 3DAFM was designed specifically to address Critical Dimension (CD), depth and chemical mechanical planarisation (CMP) metrology in a production environment.