Nanopositioning using standing wave piezoelectric motors

In photonics motion control applications, how do you combine speed with nanometric precision and unlimited travel? These seemingly conflicting requirements are uniquely addressed by ultrasonic, standing-wave, direct-drive piezoelectric motors. This technology provides unlimited linear or rotary motion of a ceramic tip that transfers drive to a target, operating in a manner similar to a DC servo motor but with much higher resolution, an order-of-magnitude higher speed and a wider dynamic range. This paper will review the technology of Nanomotion’s patented standing-wave piezoelectric motors and explains how their combination of nanometric precision, near-silent motion and their ability to function in many challenging environments achieves the utmost in precision positioning in demanding semiconductor, medical and photonics applications