EUV lithography reaches the starting line
3 September 2018
Lithographic semiconductor processes using extreme ultraviolet light are set to enter mass production, writes Andy Extance, but must continue to improve
Veeco
Veeco
Veeco’s Spector-HT ion beam sputtering system for optical coating offers excellent layer thickness control, enhanced process stability and the lowest optical losses
Veeco
Veeco’s Spector-HT Advanced Ion Beam Sputtering System will be on show, offering excellent layer thickness control, enhanced process stability and the lowest published optical losses in the industry.
