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Low-profile XY linear motor stages

Aerotech has announced a series of integrated open-frame stages with precise geometric performance and micrometer-level straightness. The new PlanarDLA stages include high precision roller bearings, precision machined surfaces and non-contact linear motors that drive through the axes’ centre of stiffness. These features result in straightness to ±0.5µm and flatness to ±1.25µm.


The low-profile stages are designed for a wide range of applications from highly dynamic two-sided LED wafer processing to quasi-static optical metrology. There are nine models in the series to accommodate customer requirements for travel and accuracy. Applications include semiconductor manufacturing, electronics manufacturing (LEDs), test and inspection, laser processing, micro-machining, and automation.


The PlanarDLA enables high-throughput, high-accuracy processing with 2m/s velocities and 2g accelerations, resulting in high process yield and a low total cost of ownership. It achieves high servo bandwidths while maximising the clear aperture available and keeping the overall height to a minimum.


Aerotech’s proprietary direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. The stages are available with one or two motors per axis allowing optimisation of each axis for the specific application and process.


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