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Piezosystem Jena has launched the new MIPOS 16, specifically designed for high-precision positioning of optical systems with an accuracy in the sub-nanometre range.

Based on its design with a 158mm aperture and a stage height of 42mm, the MIPOS 16-158  offers technical specifications matching the requirements of white light interferometry. In the field of 3D surface measurement, white light interferometry has become one of the most effective methods.

Piezoelectric actuators are able to improve accuracy and speed significantly due to their virtually unlimited resolution and fast response time. The MIPOS 16-158 can achieve a focus range up to 16µm and single-step resolution of less than 0.1nm, while operating in a voltage range between -20 and +130V.

The MIPOS 16-158 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo-based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in high dynamic environments while settling time is reduced down to microseconds.