ZeGage Plus

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The ZeGage Plus optical profiler, a full-featured instrument for the 3D measurement of surface topography and roughness has been announced by Zygo Corporation. According to the company, the system provides the same ease of use, vibration robustness and small footprint as the ZeGage profiler, but with a higher level of precision, faster measurement speed, and an increased range of measurable surfaces and features. 

The ZeGage Plus uses Zygo’s Mx software, for enhanced data visualisation and quantification of step heights, texture, and volumetric applications. This optimised metrology software for data acquisition and analysis provides added capabilities for regions analysis and advanced patterns. In addition, ZeGage Plus profilers with optional automated XY sample stages have the ability to combine overlapping measurements for the characterisation of larger areas.

Zygo’s wide range of optimised objectives provides the user with the ability to select the desired magnification and field of view without affecting height precision. Many of the company's list of parfocal objectives can be used with ZeGage Plus profilers, from 1.4X to 50X, as well as 1X to 10X long working distance, and a 5X super-long working distance lens.